VII conference on low temperature plasma in the processes of functional coating preparation 2015 : Kazan, Russia : 4-7 November 2015 : Nov 2015, Kazan, Russia. (Journal of Physics: Conference Series ; 669)
VII conference on low temperature plasma in the processes of functional coating preparation 2015 : Kazan, Russia : 4-7 November 2015 : Nov 2015, Kazan, Russia.
Papers."The VII All-Russian ... Scientific Technical Conference 'Low-temperature plasma during the deposition of functional coatings' took place from ...
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