その他のタイトルProceedings : ASPE 2012 summer topical meeting : precision engineering and mechatronics supporting the semiconductor industry : June 2012.
一般注記Program, an abstract and papers.
"Volume 53" -- backcover.
"This topical meeting is a second version of the highly successful meeting held in Spring 2008, Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment." -- foreword.
"A full-day tutorial on Sunday, June 24 will give participants (...) The 2012 Summer Topical Meeting will span 2 days with technical presentations, (...)" -- foreword.
書誌注記Includes bibliographical references and author index.