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Format 会議録

ULSI process integration 7 : 7th symposium on ULSI process integration : 220th meeting of the Electrochemical Society : Oct 2011, Boston, MA

details

Title ULSI process integration 7 : 7th symposium on ULSI process integration : 220th meeting of the Electrochemical Society : Oct 2011, Boston, MA
Series ECS Transactions, 41 (no. 7)
Place of Publication (Country Code) US
Place of PublicationPennington
PublisherElectrochemical Society
Date c2011
Size & Duration ix, 417 p. : ill. ; 23 cm
Description ISBN : 9781566779074 (Hardcover), 9781607682615 (PDF)
Description ISSN : 19386737 (online), 21512051 (cd-rom)
Description Papers
Description Includes bibliographical references and author index
ISBN 9781566779074
ISBN 9781607682615
ISSN 19386737
ISSN 21512051
ISSN 19385862
Parallel Title Dielectric and semiconductor materials, devices, and processing
Year of Publication(W3CDTF) 2011
NDLC M17
Target Audience 一般
Material Type 図書
Material Type 会議録
Language(ISO639-2 Form) eng : English

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