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Format 図書

プラズマ/プロセスの原理

Michael A.Lieberman, Allan J.Lichtenberg 著,佐藤久明 訳,堀勝 監修

details

Title プラズマ/プロセスの原理
Author Michael A.Lieberman, Allan J.Lichtenberg 著
Author 佐藤久明 訳
Author 堀勝 監修
Personal Name (Author) Lieberman, Michael A
Personal Name (Author) Lichtenberg, Allan J
Personal Name (Author) 佐藤, 久明
Personal Name (Author) 堀, 勝, 1958-
Place of Publication (Country Code) JP
Place of Publication東京
Publisher丸善
Date 2010.1
Size & Duration 612p ; 26cm
Description 初版: EDリサーチ社2001年刊
Description 原タイトル: Principles of plasma discharges and materials processing.2nd ed
Description 文献あり 索引あり
ISBN 9784621082232
Price 18000円
National Bibliography No.(JPNO) 21712093
NS-MARC No. 110072600
Parallel Title Principles of plasma discharges and materials processing.2nd ed
Edition 第2版
Year of Publication(W3CDTF) 2010
Subject Heading(Keyword) プラズマ
Subject Heading(Keyword) 薄膜
NDLC MC241
NDC(9th revised) 427.6 : Electricity and magnetism
Original Lunguage (ISO639_2) eng : English
Target Audience 一般
Material Type 図書
Language(ISO639-2 Form) jpn : 日本語

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