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Format 記事・論文

レーザPVD法によるセラミック硬質膜の作成

宮沢 肇 他

details

Title レーザPVD法によるセラミック硬質膜の作成
Author 宮沢 肇 他
Place of Publication (Country Code) JP
Description 記事分類: 化学・化学工業--無機化学・無機化学工業--非金属元素・非金属化合物--セラミックス
Year of Publication(W3CDTF) 1993-01
NDLC ZN12
Target Audience 一般
Material Type 記事・論文
is part of (URI Form) https://iss.ndl.go.jp/books/R100000002-I000000043699-00
is part of (ISSN Form) 09120289
is part of (ISSN-L Form) 09120289
Magazine-which-carries-the-article name 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
Printing volume 59
Printing number 1
Printing page p113~118
Language(ISO639-2 Form) jpn : 日本語

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