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Format 記事・論文

同心円筒形DCグロー放電によるα-Si:H成膜時の基板加熱の解析

山口 由岐夫 他

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Title 同心円筒形DCグロー放電によるα-Si:H成膜時の基板加熱の解析
Author 山口 由岐夫 他
Series CVD<特集> ; シミュレーション・移動現象
Place of Publication (Country Code) JP
Year of Publication(W3CDTF) 1990-05
NDLC ZP5
Target Audience 一般
Material Type 記事・論文
is part of (URI Form) https://iss.ndl.go.jp/books/R100000002-I000000026852-00
is part of (ISSN Form) 0386216X
is part of (ISSN-L Form) 0386216X
Magazine-which-carries-the-article name 化学工学論文集
Printing volume 16
Printing number 3
Printing page p605~613
Language(ISO639-2 Form) jpn : 日本語

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