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Format 記事・論文


山本 稔,岡本 孝太郎,今井 哲二


Title スパッタによるタングステン膜の特性と4μmグレーティングの製作
Author 山本 稔
Author 岡本 孝太郎
Author 今井 哲二
Place of Publication (Country Code) JP
Place of Publication調布
Date 35(1) 1984.08
Description 記事分類: 電気工学--電子工学--集積回路
Year of Publication(W3CDTF) 1984-08
Target Audience 一般
Material Type 記事・論文
is part of (URI Form)
is part of (ISSN Form) 04934253
is part of (ISSN-L Form) 04934253
Magazine-which-carries-the-article name 電気通信大学学報 / 電気通信大学 編
Printing volume 35
Printing number 1
Printing page p7~12
Language(ISO639-2 Form) jpn : 日本語

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