記事・論文
| Title | 電磁駆動型シリコンMEMSレゾネータ |
|---|---|
| Author | 渡部 善幸 |
| Author | 矢作 徹 |
| Author | 阿部 泰 |
| Author | 村山 裕紀 |
| Place of Publication (Country Code) | JP |
| Place of Publication | [東京] |
| Publisher | Institute of Electrical Engineers of Japan |
| Date | 34:2017.10.31-11.2 |
| Parallel Title | Electromagnetic Silicon MEMS Resonator |
| Year of Publication(W3CDTF) | 2017 |
| Subject Heading(Keyword) | 電磁駆動 |
| Subject Heading(Keyword) | 誘導検出 |
| Subject Heading(Keyword) | MEMSレゾネータ |
| Subject Heading(Keyword) | マルチモーダルセンサ |
| Subject Heading(Keyword) | 振動検出型 |
| Subject Heading(Keyword) | electromagnetic drive |
| Subject Heading(Keyword) | electromotive force detection |
| Subject Heading(Keyword) | MEMS resonator |
| Subject Heading(Keyword) | multi-modal sensor |
| Subject Heading(Keyword) | vibration sensing |
| NDLC | ZN33 |
| Target Audience | 一般 |
| Material Type | 記事・論文 |
| is part of (URI Form) | https://iss.ndl.go.jp/books/R100000002-I000010643656-00 |
| Magazine-which-carries-the-article name | 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] |
| Printing volume | 34 |
| Printing page | 1-5 |
| Language（ISO639-2 Form) | jpn : 日本語 |
