The site menu is from hereThe head of this page

This is an explanation of shortcut keys. To link or execute a function, press any of the following combinations of shortcut keys and then press Enter.  To listen to an explanation of shortcut keys, press Alt and 0.  To display the top page, press Alt and 1.  To login, press Alt and 2.  To display the Simple Search page, press Alt and 3.  To display the Advanced Search page, press Alt and 4.  To display the Search page for persons with disabilities, press Alt and 5.  To sort search results, press Alt and 6.  To display the NDL homepage, press Alt and 7.  To refine search results, press Alt and 8.  This ends the explanation of shortcut keys.

The navigation is from here

The navigation is to here

A body is from here

Format 記事・論文


渡部 善幸,矢作 徹,阿部 泰,村山 裕紀


Title 電磁駆動型シリコンMEMSレゾネータ
Author 渡部 善幸
Author 矢作 徹
Author 阿部 泰
Author 村山 裕紀
Place of Publication (Country Code) JP
Place of Publication[東京]
PublisherInstitute of Electrical Engineers of Japan
Date 34:2017.10.31-11.2
Parallel Title Electromagnetic Silicon MEMS Resonator
Year of Publication(W3CDTF) 2017
Subject Heading(Keyword) 電磁駆動
Subject Heading(Keyword) 誘導検出
Subject Heading(Keyword) MEMSレゾネータ
Subject Heading(Keyword) マルチモーダルセンサ
Subject Heading(Keyword) 振動検出型
Subject Heading(Keyword) electromagnetic drive
Subject Heading(Keyword) electromotive force detection
Subject Heading(Keyword) MEMS resonator
Subject Heading(Keyword) multi-modal sensor
Subject Heading(Keyword) vibration sensing
Target Audience 一般
Material Type 記事・論文
is part of (URI Form)
Magazine-which-carries-the-article name 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
Printing volume 34
Printing page 1-5
Language(ISO639-2 Form) jpn : 日本語

A body is to here

Copyright © 2012 National Diet Library. All Rights Reserved.

Foot is to here