並列タイトル等Evolution of silicon materials characteristics, lessons learned for improved manufacturing
一般注記Distributed to depository libraries in microfiche
Shipping list no.: 94-0057-P
Paper version no longer for sale by the Supt. of Docs
"July 1993."
Physical description for original version: iv, 27, 201-211 p. : 28 cm
書誌注記Includes bibliographical references (p. 23-25)
原資料等に関する注記原資料の出版事項: Gaithersburg, MD ; Washington, D.C. : U.S. Dept. of Commerce, National Institute of Standards and Technology : For sale by the Supt. of Docs., U.S. G.P.O., 1993
SUPTDOC番号: C 13.10: 400-92
GPO管理番号: 0247 (MF)