並列タイトル等Antireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
一般注記Distributed to depository libraries in microfiche
Shipping list no.: 92-2096-M
Paper version no longer for sale by the Supt. of Docs
"Issued January 1992."
Physical description for original version: xi, 37 p. : 28 cm
書誌注記Includes bibliographical references
原資料等に関する注記原資料の出版事項: Gaithersburg, MD ; [Springfield, VA : U.S. Dept. of Commerce, National Institute of Standards and Technology : Order from National Technical Information Service], 1992
SUPTDOC番号: C 13.10: 260-117
GPO管理番号: 0247 (MF)