Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon / G.A. Candela ... [et al.] (Standard reference materials) (NIST special publication ; 260-109)
Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon / G.A. Candela ... [et al.]
(Standard reference materials) (NIST special publication ; 260-109)