検索結果 4 件
デジタル記事
インターネットで読める全国の図書館
- 要約等In order to evaluate strength reliability of micron size polycrystalline silicon (poly-Si) structure for MEMS, bending strength tests of cantilever bea......ibull analysis of the strength and fracture s......the importance of microelectromechanic......and the number of production is ......maintain their reliability in face of external shock......production era of the MEMS, in c......e the material strength design of MEMS is performed, required strength data is not av...... value assumed of the structure and material. Micron size poly-Si structure is widely empl......e MEMS such as microsensor, switchi......er to evaluate strength reliability of micron size po...
- 件名... concentration Reliability Strength Polycrystalline silicon
- 並列タイトル等（連結）OS5-2-4 Strength Reliability of Micro Polycrystalline Silicon Structure
デジタル記事
インターネットで読める全国の図書館
- 件名Polycrystalline silicon Strength Reliability Stress concentration Weibull ...
- 関連情報Memoirs of the Faculty of Engineering, K......shu University || 67(3) || p105-116 九州大学工学紀要 || 67(3) || p105-116
デジタル記事
インターネットで読める全国の図書館
- 要約等In order to evaluate strength reliability of micron size polycrystalline silicon (poly-Si) structure for microelectromechanic......MEMS), bending strength tests of cantilever bea......ibull analysis of the strength and fracture s......the importance of MEMS in societ......and the number of production is ......maintain their reliability in face of external shock....... When the age of the MEMS mass ......e the material strength design of MEMS is performed, required strength data is not av...... value assumed of the structure and material. ......er to evaluate strength reliability of micron size poly-Si structure, tests and analysis are perfo...
- 件名Polycrystalline silicon Strength Reliability Stress concentration Weibull ...
デジタル記事
全国の図書館
- 要約等In order to evaluate strength reliability of micron size polycrystalline silicon (poly-Si) structure for MEMS, bending strength tests of cantilever bea......ibull analysis of the strength and fracture s......the importance of microelectromechanic......and the number of production is ......maintain their reliability in face of external shock......production era of the MEMS, in c......e the material strength design of MEMS is performed, required strength data is not av...... value assumed of the structure and material. Micron size poly-Si structure is widely empl......e MEMS such as microsensor, switchi......er to evaluate strength reliability of micron size po...
- 件名Polycrystalline silicon Strength Reliability Stress concentration Weibull ...
- 出版者（掲載誌）The Japan Society of Mechanical Engineers
検索結果は以上です。