検索結果 21 件
紙記事
国立国会図書館全国の図書館
- 出版者（掲載誌）Tokyo : The Japan Society of Applied Physics
デジタル記事
全国の図書館
- 件名...d Optics Radiation Electronic, Optical and Magne...
- 参照Surface characterization of functional iron–gallium alloys annealed under different conditions
デジタル記事
全国の図書館
- 要約等...:p>The surface modification of oxides MoO<jat...... under irradiation by Ar<jats:sup>+</jats:sup> ions with an energy of 3 keV in high ...... under irradiation by Ar<jats:sup>+</jats:sup> ions lower and int......surface layers of higher oxides.......at the process of ion‐beam reduction of the surface of oxides MoO<jat......on the irradiation dose and diffe......ence in energy of the metal–oxygen bond in oxid...
- 参照A library of atomically thin metal chalcog...
デジタル記事
全国の図書館
- 要約等...ynamics simulations of continuous 50–200 eV Ar+ bombardment on wurtzite an......inc blende GaN surfaces are reported. ......cal sputtering of GaN compounds.......ial sputtering of N atoms is ini......up to 3.5×1015 ions/cm2 fluence, ......line structure of the GaN sample......apid amorphization of the top surfac......cts. Concentration depth profiles indicate a......N/Ga concentration ratio equal to......0.1 for 100 eV bombardment, in agreement ......the same conditions, Ga, N, and G......25, 60, and 7% of the sputtered ......gnificant fraction of those products......ge the passivation layers on side......ed by physical bombardment.</jats:p>
- 件名Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matt...
デジタル記事
全国の図書館
- 件名Materials Chemistry Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matt...
- 参照Nanostructuring of an alkali halide surface by l...
デジタル記事
全国の図書館
- 要約等...ds and surface modification of poly(methyl me......mono-energetic ion beams and/or v......d with the use of a low-energy mass-selected ion beam system. S......ttering yields of PMMA by Ar<jat......nline-formula> ion beams are obtained as functions of ion incident energ......d that surface modification of PMMA due to <......nline-formula> ion incidence is l......ited to the region near the film ......p>+</jats:sup> ion incidence is s......vely deeper region of the film, wher......nder the conditions of incident energies and fluxes of ion and VUV light ......uttering yield of PMMA by simult......eous incidence of VUV light and <jats:inline-f...
- 件名Surfaces, Coatings and Films Acoustics...
- 参照Self-sputtering of the Lennard–Jo......r for incident ions with differen......ttering yields of the Lennard–Jo......Plasma etching of single fine particle trapped ...
デジタル記事
全国の図書館
- 参照Study of photoresist et......oughness formation in electron-be......m system Study of 193nm photoresist degradation during short t......re. I. Studies of modified layer formation Study of ion and vacuum ult......plasma Fabrication of sub-60-nm cont......layers Effects of CH2F2 and H2 f......ch selectivity of silicon nitrid......plasmas Effect of high-frequency variation on the etch characteristics of ArF photoresis......ng and Degradation of 193 nm Photore......ergistic Roles of Vacuum Ultraviolet Radiation and Ion Bombardment Beam study of the Si and SiO......c fluorocarbon ions Ar ...... + bombardment of 193nm photoresist: Morphol...
デジタル記事
全国の図書館
- 要約等...esses. Degradation of photoresists d...... the sidewalls of etched pattern......the mechanisms of etching photor......pattern definition. In this study......on the surface of a photoresist by the bombardment of fluorocarbon ions of CF<jats:sup>+<......and argon (Ar) ions were analyzed...... etching yield of the modified s......nt on the mass of incident ion species. The surface composition was modified w......reasing dosage of each ion species, and r......pendent on the ion species. The bombardment of F-rich ion species such a......d in the formation of not only fluor....... On the basis of these results, the surface re...
- 参照...y beam-irradiation of CF<sub>4</sub>plasma Ashing of photoresists u......mas Dependence of absolute photo......orbance alteration and surface ro......ma Development of the sputtering yields of ArF photoresis......fter the onset of argon ion bombardment
- 参照Study of photoresist et......oughness formation in electron-be......m system Study of 193nm photoresist degradation during short t......re. I. Studies of modified layer formation Study of ion and vacuum ult......plasma Fabrication of sub-60-nm cont......layers Effects of CH2F2 and H2 f......ch selectivity of silicon nitrid......plasmas Effect of high-frequency variation on the etch characteristics of ArF photoresis......ng and Degradation of 193 nm Photore......ergistic Roles of Vacuum Ultraviolet Radiation and Ion Bombardment Beam study of the Si and SiO......c fluorocarbon ions Ar ...... + bombardment of 193nm photoresist: Morphol...
デジタル記事
全国の図書館
- 件名Instrumentation Nuclear and High Energy Physi...
- 参照Copper cladding on polymer surfaces by ionization-assisted deposition Improvement of Adhesion Strength of Fluoropolymer ......y Vapor Deposition Polymerization
記事
全国の図書館
デジタル記事
全国の図書館
- 参照Effects of Slow Highly Charged Ion Impact Upon Hi......hite-Nanoscale Modification of Electronic States of Graphite Surface-
紙図書
全国の図書館
- 件名Surfaces (Technology) Ion bombardment Ion implantation Sputtering (Physics)
- 件名（識別子）Surfaces (Technology) Ion bombardment Ion implantation Sputtering (Physics)
- 関連情報Beam modification of materials
紙図書
全国の図書館
デジタル記事
全国の図書館
- 件名Instrumentation Nuclear and High Energy Physi...
- 参照Trapping and Detrapping Mechanisms of Deuterium in SiC Studied by X...
デジタル記事
全国の図書館
- 件名Materials Chemistry Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matt...
デジタル記事
インターネットで読める全国の図書館
- 件名Bio-Compatibility Polymer Surface Modification Bio-Materials Ion Beam Bombardment
デジタル記事
全国の図書館
- 参照Low-Energy Ionic Collisions at Molecular Solids
デジタル記事
全国の図書館
- 要約等<jats:p>Argon and carbon ion bombardment of p-diamond at 5......ectron diffraction analysis. Both......gon and carbon ion bombardment at room temper......yer. The radiation damage was man......y the introduction of a distinct C 1......less than that of the bulklike d......y the introduction of some additional filled state......ence band edge of diamond. It wa......rison to argon bombardment, carbon bombardment was more effic......ructed diamond surfaces after hydrogen desorption [see, e.g., B....... vacancy formation and aggregation which give some ‘‘internal surfaces’’ with a behav...... introduced by ion bombardment are associated wi...
- 参照Improved pumping speeds of oxygen-free pa......gs and suppression of outgassing by ......copic analysis of tungsten carbi......rface Analysis of Carbon–Hydroge......trolled Oxygen Ion Beam
デジタル記事
全国の図書館
- 件名Materials Chemistry Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matt...
- 参照...nic structures of<mml:math xmlns......row></mml:math>surfaces