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検索結果 9 件

Structural and electrical characterization of HBr/O2 plasma damage to Si substrate

Structural and electrical characterization of HBr/O2 plasma damage to Si substrate
デジタル記事
Fukasawa, Masanaga, Nakakubo, Yoshinori, Matsuda, Asahiko, Takao, Yoshinori, Eriguchi, Koji, Ono, Kouichi, Minami, Masaki, Uesawa, Fumikatsu, Tatsumi, Tetsuya2011-06-23Journal of Vacuum Science ＆ Technology A: Vacuum, Surfaces, and Films29 4p.041301-1-041301-7
全国の図書館

Structural and electrical characterization of HBr/O2 plasma damage to Si substrate

Structural and electrical characterization of HBr/O2 plasma damage to Si substrate
記事
2011-06-23Journal of Vacuum Science ＆ Technology A: Vacuum, Surfaces, and Films29 4p.041301-1-041301-7
全国の図書館
  • 掲載誌（ISSN）15531813

Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices

Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices
デジタル記事
Eriguchi, Koji, Takao, Yoshinori, Ono, Kouichi2011-06-23Journal of Vacuum Science ＆ Technology A: Vacuum, Surfaces, and Films29 4p.41303-
全国の図書館

Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices

Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices
デジタル記事
2011-06Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films29 4p.41303-
インターネットで読める全国の図書館
  • 掲載誌（ISSN）07342101 15531813

Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications

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デジタル記事
Umemoto, Hironobu, Setoguchi, Shota, Uemura, Hitoshi, Matsumura, HidekiAmerican Institute of Physics2008-02-26Journal of Vacuum Science and Technology A26 2p.309-311
全国の図書館
  • 掲載誌（ISSN）15531813

Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications

Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications
デジタル記事
2008-02-26Journal of Vacuum Science and Technology A26 2p.309-311
全国の図書館
  • 掲載誌（ISSN）15531813

Characteristic structures of the Si(111)-7×7 surface step studied by scanning tunneling microscopy

Characteristic structures of the Si(111)-7×7 surface step studied by scanning tunneling microscopy
デジタル記事
2001-07Journal of Vacuum Science & Technology A19 4p.1549-1552
インターネットで読める全国の図書館
  • 掲載誌（ISSN）15531813

Characteristic structures of the Si(111)-7×7 surface step studied by scanning tunneling microscopy

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デジタル記事
Miyake, K., Okawa, S., Takeuchi, O., Futaba, D. N., Hata, K., Morita, R., Yamashita, M., Shigekawa, H.American Vacuum Society2001-07Journal of Vacuum Science & Technology A19 4p.1549-1552
インターネットで読める全国の図書館

Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society

Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
紙雑誌
American Institute of Physics1983-
全国の図書館
  • ISSN15531813
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